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Found one definition

1.                 From The Free On-line Dictionary of Computing (19 January 2023):
                   
   
   
                   
                     
   microelectromechanical system
   MEMS
      <hardware> (MEMS) The integration of mechanical structures
      (moving parts) with microelectronics.  MEMS devices are
      "custom" designed for a purpose which requires a mechanical
      action to be controlled by a computer.
      Applications include sensors, medical devices, process
      controls.
      (http://mems.mcnc.org/).
      See also nanotechnology.
      (1999-03-25)